Components for Semiconductor Equipment and Tooling

JACO Machine Works brings extensive expertise and experience to the semiconductor industry, specializing in machining a wide range of components and machine tools. With a strong focus on machining high purity materials – such as vacuum re-melt 316L SSTL and Hastelloy alloys – JACO excels in producing critical parts. These parts meet the stringent cleanliness and precision standards required in semiconductor manufacturing. This ensures minimal contamination and optimal performance in semiconductor applications. Our advanced capabilities, supply chain management, and commitment to quality make JACO a trusted partner in the industry.

Materials for Semiconductor Tooling

Semi F20 316 stainless steel and Hastelloy alloys C22 and C276 are widely used in the semiconductor industry due to their exceptional resistance to corrosion and high purity levels. Semi F20 316 stainless steel, with its vacuum re-melt process, ensures minimal impurities, making it ideal for environments where contamination must be avoided. Hastelloy C22 and C276 offer superior resistance to a wide range of corrosive chemicals, including those used in semiconductor fabrication processes.

Additionally, Ultem plastic is utilized for its excellent thermal stability, high strength, and resistance to chemicals, making it suitable for various semiconductor applications. These materials maintain their integrity and performance under extreme conditions, ensuring the reliability and longevity of critical semiconductor components.

Components we make:

Heat Sinks for Gas Lines: These are essential components in semiconductor manufacturing, designed to manage and dissipate heat generated by the gases used in various processes. These heat sinks help maintain optimal temperatures within the gas lines, preventing overheating and ensuring the stability and efficiency of gas flow. By effectively cooling the gas lines, they help maintain the integrity of the gases. Proper temperature control provided by these heat sinks ensures consistent performance and high-quality output in semiconductor fabrication.
Manifolds for Gas Delivery Weldments: Manifolds are needed in the assembly of semiconductor equipment to provide structural support and alignment for various components. These blocks ensure that the upper disconnect mechanisms are securely welded and properly positioned, facilitating reliable electrical connections and mechanical stability. This is vital for maintaining the performance and safety of semiconductor manufacturing tools.
Blocks for ESC Supply and DWTC: Blocks for Electrostatic Chuck (ESC) systems ensure a stable power supply, which hold semiconductor wafers during processes like etching and deposition, maintaining precision and quality. Double Wall Tube Connectors (DWTC) provide secure, leak-proof connections in gas and fluid delivery systems, protecting against contamination and ensuring the purity and integrity of gases and fluids used in semiconductor manufacturing.

Citric Passivation for Stainless Steel Components

Our certified Citric Acid Passivation process plays a crucial role in enhancing the quality and longevity of stainless-steel semiconductor components. Utilizing our controlled chemistry, detailed recordkeeping, and strict adherence to lot control and traceability, our process allows for consistent and repeatable results. Our process is certified per ASTM A967 and ASTM A380 standards, and our certification is provided free of charge. Benefits of citric passivation on stainless steel semiconductor equipment components include:

Enhanced Corrosion Resistance: Citric passivation effectively removes free iron and other contaminants from the surface, significantly improving the corrosion resistance of stainless steel components.
Improved Surface Cleanliness: The process results in a cleaner, more passive surface, reducing the risk of contamination in sensitive semiconductor manufacturing environments.
Extended Component Lifespan: By enhancing the protective oxide layer, citric passivation helps extend the lifespan of stainless steel components, leading to reduced maintenance and replacement costs.

Machining and Laser Welding Services

5 Axis Precision Milling - 5 Axis Precision Machining is essential in the semiconductor industry for creating complex machine tools with intricate geometries and angles, such as wafer handling systems and precision alignment tools. Machining parts from multiple angles in a single setup increases efficiency and accuracy, ensuring that the tools meet the stringent tolerances required in semiconductor manufacturing.

Vertical and Horizontal CNC Milling - Vertical CNC milling is often used for tasks that require high precision and detail, such as machining the intricate features of alignment fixtures and precision mounts. Horizontal CNC milling, on the other hand, is ideal for larger parts and can handle substantial material removal, making it suitable for producing robust machine bases and structural components that require durability and strength.

CNC and Swiss Screw Machining - Screw Machining is highly efficient for producing small, intricate parts with high precision. Swiss screw machines are particularly adept at manufacturing components with tight tolerances and complex shapes, such as precision fasteners, spacers, and miniature fittings used in semiconductor equipment. These machines ensure consistent quality and high production rates, essential for meeting the fast-paced and ever-changing demands of the semiconductor industry.

Laser Welding - Laser Welding provides strong, precise welds that are crucial for the structural integrity and performance of semiconductor machine tools. This method is used to assemble components such as vacuum chambers, gas delivery systems, and other critical parts that require clean and robust joints.

Quality Assurance

JACO Machine Works’ comprehensive Quality Management System (QMS) is certified to ISO9001:2015 and AS9100D standards. This certification underscores our commitment to safety, reliability, and precision in every component we produce. Whether it’s risk analysis, raw material inspection, recordkeeping, supplier management, or final assembly, we adhere to strict quality control measures. Here’s how our QMS ensures reliable and repeatable results:

Continuous Improvement: We evaluate process effectiveness continually. Factors like on-time deliveries, customer satisfaction, and quality conformance drive our improvement efforts.
Risk Analysis: Identifying and mitigating risks preemptively is essential. Our upper management reviews high-risk jobs before production begins, ensuring quality from the outset.
Traceability and Documentation: We maintain full lot and material traceability throughout production, complying with customer and regulatory specifications. Rigorous documentation ensures complete accountability and demonstrates product conformance.
State-of-the-Art Inspection: Our automatic CMM (Coordinate Measuring Machine) uses powerful software to inspect complex part geometries directly from solid model files. This technology allows for fast, repetitive inspections at a low cost.

Why Choose JACO?

JACO Machine Works is a leading CNC machining manufacturer of precision components for many industries, including components for medical devices and surgical instruments, aerospace and defense projects, sensor devices, robotics, electrical connectors, and more. Whatever your application might be, our engineers at JACO are happy to help bring your product to market in the shortest amount of time and at the lowest cost possible. We are committed to providing you with quality engineering, design services, and supply chain management that will exceed your expectations and meet every specification.